| 发明名称 |
Capacitor and manufacturing method thereof, semiconductor device and substrate for a semiconductor device |
| 摘要 |
A capacitor includes a capacitor part formed of a dielectric film sandwiched by a pair of electrodes and a support body formed of a film of an organic polysilane. The support body is provided so as to support the capacitor part thereon.
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| 申请公布号 |
US2005130368(A1) |
申请公布日期 |
2005.06.16 |
| 申请号 |
US20050048556 |
申请日期 |
2005.02.01 |
| 申请人 |
OOI KIYOSHI;HORIKAWA YASUYOSHI;YAMASAKI TOMOO |
发明人 |
OOI KIYOSHI;HORIKAWA YASUYOSHI;YAMASAKI TOMOO |
| 分类号 |
H01L23/12;H01G4/224;H01L21/68;H01L23/50;H01L23/64;H05K1/16;(IPC1-7):H01L51/40;H01L21/44;H01L21/824 |
主分类号 |
H01L23/12 |
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