SILICON SPRING ELECTRODE AND ANISOTROPIC CONDUCTIVE SHEET

摘要

Disclosed is an anisotropic conductive sheet which can be applied for finer- and narrower-pitch electrodes. Also disclosed is an electrode used in such an anisotropic conductive sheet. A silicon spring electrode (1) is produced by forming a bending flat spring member out of a single crystal silicon material by anisotropic etching and plating the surface of the flat spring member with gold. The thus-formed spring electrode (1) is fitted and fixed in a through hole formed in a silicon rubber sheet.