发明名称 |
PIEZOELECTRIC FILM, PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ACTUATOR, PIEZOELECTRIC PUMP, INK-JET RECORDING HEAD, INK-JET PRINTER, SURFACE ACOUSTIC WAVE ELEMENT, THIN FILM PIEZOELECTRIC RESONATOR, FREQUENCY FILTER, OSCILLATOR, ELECTRONIC CIRCUIT, AND ELECTRONIC APPARATUS |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a piezoelectric film having good piezoelectric characteristics. <P>SOLUTION: The piezoelectric film 5 is expressed by the general formula of Pb<SB>1-b</SB>[((X<SB>1/3</SB>Nb<SB>2/3</SB>)<SB>1-c</SB>B'<SB>c</SB>)<SB>1-a</SB>Y<SB>a</SB>]O<SB>3</SB>. In the formula, X is composed of at least one of Mg, Zn, and Ni, the B' is composed of at least one of Zr, Ti, and Hf, and Y is composed of at least one of V, Nb, Ta, Cr, Mo, and W. In the addition, a is adjusted to 0.05≤a<0.30, and b is adjusted to 0.025≤b≤0.15, and c is adjusted to 0.25≤c≤0.035 when X is Mg, 0.30≤c≤0.40 when X is Ni, and 0.05≤c≤0.15 when X is Zn. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |