| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve problems with components for a vacuum device used for a plasma apparatus and a film deposition apparatus of semi-conductor or the like that a product is stained by separation of a component itself during the use, separation of a film-like substance deposited on a component surface, and corrosion of the component surface by plasma, shortening of the lifetime of the component, and degradation of productivity by frequent replacement of the component. <P>SOLUTION: In the component for the vacuum device used for a film deposition apparatus and a plasma treatment device of semi-conductor or the like, the surface thereof is covered by ceramic and/or metal thermal-sprayed film, projection-shaped particles of the width of 10-300 μm and the height of 4-600 μm and the ratio (H/W) of the width (W) to the height (H) of ≥0.4 are present in a density range of 20 pieces/mm<SP>2</SP>to ≤20,000 pieces/mm<SP>2</SP>on the surface of the thermal-sprayed film. The film-like substance of the porosity of 10-40% is high in adhesiveness, free from any stain of the product caused by dust attributable to separation of the film-like substance, and continuously usable for a long time. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
