摘要 |
PROBLEM TO BE SOLVED: To provide an antireflection film which is to be applied on an interface between an optical adhesive and a laser element or on an interface between the optical adhesive and an optical element and moreover which is constituted of a monolayer optical thin film. SOLUTION: The antireflection film is essentially composed of oxide consisting of Al and Y deposited by sputtering using one or more kinds of crystalline bodies or sintered bodies selected from among YAG (Y<SB>3</SB>AL<SB>5</SB>O<SB>12</SB>), YAlO<SB>3</SB>, Y<SB>4</SB>Al<SB>2</SB>O<SB>9</SB>, Al<SB>2</SB>O<SB>3</SB>, Y<SB>2</SB>O<SB>3</SB>as material for sputtering target and by controlling the temperature of a surface to be deposited of the laser element or the optical element and also is constituted of the monolayer optical thin film which has a refractive index having the same or the roughly same value as that of a refractive index (Nf) which is calculated from a following numerical formula (1). The numerical formula (1) is expressed by Nf=√(NO×Ns), provided, NO and Ns express respectively the refractive index of the optical cement and the refractive index of the laser element or the optical element. COPYRIGHT: (C)2005,JPO&NCIPI
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