CAPACITANCE TEMPERATURE SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a capacitance temperature sensor having a high dielectric constant at a low temperature, using a strontium titanate thin film as a dielectric, and free from a residual polarization characteristic, using a parallel plate capacitor of low electric field dependence. SOLUTION: This capacitance temperature sensor comprises the parallel plate capacitor 2 using as the dielectric a high dielectric constant of strontium titanate thin film laminate with the second strontium titanate thin film formed on a polished surface, after the first strontium titanate thin film is formed on a substrate and after the thin film surface is polished by chemomechanical polishing; a measuring instrument 4 for measuring a capacitance of the strontium titanate thin film; and a measuring instrument 5 for finding a temperature based on the capacitance. COPYRIGHT: (C)2005,JPO&NCIPI