| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a micro structure having a plurality of cone shapes by using a powder blast process. SOLUTION: The method for manufacturing the micro structure by the powder blast process is characterized in that mask material is formed of a polyurethane resin composition containing a metal particle dispersion liquid on a surface of material to be processed, a fine pattern comprised of recessed portions in accordance with a lattice-shaped fine pattern and a plurality of isolated island portions other than the concave portions is formed by irradiating laser beam to at least a part of the mask material in accordance with the lattice-shaped fine pattern, powder blasting is carried out in a condition that peripheries of the respective island portions are worn out with only almost central parts left, and the respective island portions are removed. COPYRIGHT: (C)2005,JPO&NCIPI
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