| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic actuator capable of being miniaturized as well as retaining a moving member in a state where no voltage is applied to driving electrodes. SOLUTION: The electrostatic actuator is provided with a fixed substrate 1 in which a plurality of driving electrodes 2 are arranged on an insulating substrate 4 and an insulator 3 is arranged thereon, the moving member 5 arranged on the fixed substrate and moving relatively to the fixed substrate 1 by a static force generated between the driving electrodes 2 and itself, a driving control means 40 varying the voltage applied to the driving electrodes 2, and a retaining means 20 retaining the moving member 5 when it is not operated. The retaining means 20 is provided with a fixed electrode 23 and a thin plate-like member 22 with conductivity, which is fixed to the fixed electrode 23 side at one end and arranged opposedly to the fixed electrode 23. The free end of the thin plate-like member 22 gives a retaining force to the moving member 5 by a static force generated according to a change in an output voltage from the driving control means 40. COPYRIGHT: (C)2005,JPO&NCIPI
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