发明名称 |
Method for optimizing a number of kernels used in a sum of coherent sources for optical proximity correction in an optical microlithography process |
摘要 |
A method for optimizing the number of kernels N used in a sum of coherent sources (SOCS) for optical proximity correction in an optical microlithography process including setting the number of kernels N to a predetermined minimum value Nmin. A determination is made as to whether an accuracy estimate of calculated intensity is within a tolerable value. A determination is also made as to whether an added X/Y asymmetry estimate of the calculated intensity is negligible.
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申请公布号 |
US2005132310(A1) |
申请公布日期 |
2005.06.16 |
申请号 |
US20030737626 |
申请日期 |
2003.12.16 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
GALLATIN GREGG M.;GOFMAN EMANUEL;LAI KAFAI;LAVIN MARK A.;MUKHERJEE MAHARAJ;RAMM DOV;ROSENBLUTH ALAN E.;SHLAFMAN SHLOMO |
分类号 |
G03F1/14;G06F17/10;G06F17/50;(IPC1-7):G06F17/50 |
主分类号 |
G03F1/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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