发明名称 |
Wafer carrier for growing GaN wafers |
摘要 |
A wafer carrier for growing wafers includes a plate having a first surface and a second surface, a plurality of openings extending from the first surface to the second surface of the plate, and a porous element disposed in each of the plurality of openings, each porous element being adapted to support one or more wafers. The wafer carrier also has a blind central opening extending from the second surface toward the first surface of the plate, and a plurality of shafts extending outwardly from the blind central opening. Each shaft has a first end in communication with the blind central opening and a second end in communication with one of the porous elements for providing fluid communication between the blind central opening and one of the porous elements. Suction is formed at a surface of each porous element by drawing vacuum through the blind central opening and the shafts.
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申请公布号 |
US2005126496(A1) |
申请公布日期 |
2005.06.16 |
申请号 |
US20040975902 |
申请日期 |
2004.10.28 |
申请人 |
BOGUSLAVSKIY VADIM;GURARY ALEX;STALL RICHARD A. |
发明人 |
BOGUSLAVSKIY VADIM;GURARY ALEX;STALL RICHARD A. |
分类号 |
C23C16/00;C23C16/458;C30B25/12;C30B31/14;(IPC1-7):C23C16/00 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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