| 摘要 |
PROBLEM TO BE SOLVED: To provide an acoustic resonator having no spurious resonance. SOLUTION: The acoustic resonator is provided with a substrate 11 provided with an opening 12 on its surface. A piezoelectric vibrator 16 consisting of a lower electrode 13, a piezoelectric body 14 and an upper electrode 15 which are stacked thereon is provided on the substrate 11 so as to straddle over the opening 12. The section 16 is segmented into a first region 17 having a first thickness for generating main resonance, and a second region 18 surrounding the first region 17 and having a second thickness different from the first thickness. In projection in a stacking direction, a peripheral edge 17a of the first region 17 is provided on an inner side from the peripheral edge 12a of the opening 12. COPYRIGHT: (C)2005,JPO&NCIPI
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