发明名称 TILE-LIKE ELEMENT, METHOD OF MANUFACTURING THE TILE-LIKE ELEMENT, METHOD OF MANUFACTURING DEVICE, AND ELECTRONIC EQUIPMENT
摘要 PROBLEM TO BE SOLVED: To provide a tile-like element having high rigidity, and to provide a method of manufacturing tile-like element, a method of manufacturing device, and electronic equipment. SOLUTION: The tile-like element, formed into a tile-like form, has a strength-imparting layer which has insulation properties and mechanical strength. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005159314(A) 申请公布日期 2005.06.16
申请号 JP20040301893 申请日期 2004.10.15
申请人 SEIKO EPSON CORP 发明人 KONDO TAKAYUKI
分类号 H01L27/14;H01L31/10;H01S5/183;(IPC1-7):H01L31/10 主分类号 H01L27/14
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