| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a semiconductor device in which a process can be carried out in accordance with set conditions. SOLUTION: A reaction chamber and a vacuum pump are connected with a flexible tube composed of a tube body which has convex parts and concave parts and is formed of a hard material, and composed of a cover which is arranged on the outer surface of the tube body and is formed of an elastic material. After a semiconductor substrate is positioned in the reaction chamber, a reaction gas is fed into the reaction chamber which is made in a reduced pressure state by operating the vacuum pump. By reacting this reacting gas, the reactant is deposited on the semiconductor substrate. COPYRIGHT: (C)2005,JPO&NCIPI
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