| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor of high performance having a wide pressure measuring range, and a manufacturing method therefor. SOLUTION: This pressure sensor concerned consists of a sensor chip 2 having a frame 6 surrounding a diaphragm 5 and a periphery of the diaphragm 5, and having a diffusion type strain gage resistance 8 for detecting pressure applied to the diaphragm 5, and of a pedestal 3 joined to form a pressure reference chamber 4 in pressure detection with respect to the sensor chip 2 therebetween. In the pressure sensor, the diaphragm 5 is brought into a convex shape in view from the pressure reference chamber 4 when the second pressure value is equal to the first pressure value, and is brought into a flat shape in the view from the pressure reference chamber 4 when the second pressure value is pressure in an initial state of the pressure sensor, where the first pressure value is pressure of the pressure reference chamber 4 and where the second pressure value is atmospheric pressure in the periphery of the pressure sensor. COPYRIGHT: (C)2005,JPO&NCIPI
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