FLUORINE GAS PRODUCTION UNIT

摘要

There is provided a fluorine gas production unit capable of restraining damage in an abnormal situation in minimum. A fluorine gas production unit (30) comprises an electrolytic cell (32), wherein product gas consisting of fluorine gas as a main component is generated in the first gas phase portion on the anode side thereof and by-product gas consisting of hydrogen gas as a main component is generated in the second gas phase portion on the cathode side thereof. First and second pipes (52, 72) are disposed to derive the product gas and by-product gas. In the second pipe (72), there is disposed a deriving flow rate control section (74) for controlling the deriving flow rate of the by­product gas. A first dilution pipe (82) for introducing inert gas is disposed so that the hydrogen concentration in gas in the second gas phase portion on the cathode side gets 70 ≈10%. A second dilution pipe (83) for introducing inert gas into the second pipe (72) downstream of the deriving flow rate control section (74) is disposed so that the hydrogen concentration in gas coming out of the second pipe (72) gets less than 4%.