| 摘要 |
PROBLEM TO BE SOLVED: To perform measurement with high sensitivity, with a high dynamic range, and at a high speed, by enhancing the S/N ratio of a detection signal on light emitted from measuring object particles, in a measuring instrument for measuring the distribution of the object particles by measuring light emitted from the object particles such as plasma-state molecules owing to laser light irradiation. SOLUTION: This particle distribution measuring instrument 10 comprises a laser light generation unit 12, a focus lens 18a for focusing laser light as irradiation light to the measuring object particles, a detection unit 20 for detecting light emitted from the object particles irradiated with the irradiation light, and a confocal optics system forming means for causing at least a part of laser light incoming from the generation unit 12 to exit from a point at an image surface position of the focus lens 18a as irradiation light and causing light focusing at a point of a focal position of the focus lens 18a out of light emitted by the object particles to progress to the detection unit 20. COPYRIGHT: (C)2005,JPO&NCIPI
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