发明名称 MANUFACTURING METHOD FOR THIN FILM STRUCTURAL BODY, SAMPLE USED IN IT AND OPTICAL DEVICE
摘要 PROBLEM TO BE SOLVED: To precisely make a posture or a position of a supported part against a supporting base as a desired posture or a desired position. SOLUTION: A thin film structural body is furnished with the supporting base 12b, the supported part 31, a supporting part to support the supported part 31 on the supporting base 12b and a stopper 41 provided on the supporting base 12b. The posture of the supported part 31 relative to the supporting base 12 is held by a part 35 of the supporting part pressed onto the abutting part of the stopper 41 and abutting thereon. A relation between a relative position of a fixing point of the supporting part against the supporting base 12b and a contact part of the stopper 41 and the posture of the supported part 31 against the supporting base 12b is determined in manufacturing this thin film structural body. The relative position where the posture of the supported part 31 against the supporting base 12b becomes the desired posture is determined in accordance with this relation. The contact part of the stopper 41, the supporting part and the supported part 31 are formed so as to be the determined relative position. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005153068(A) 申请公布日期 2005.06.16
申请号 JP20030394631 申请日期 2003.11.25
申请人 NIKON CORP 发明人 ISHIZUYA TORU
分类号 G02B26/08;B81B3/00;B81C1/00;(IPC1-7):B81C1/00 主分类号 G02B26/08
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