VACUUM FILM DEPOSITION APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a vacuum film deposition apparatus capable of automatically carrying a base material holder between the inside and the outside of a vacuum film deposition chamber, and turning the base material holder in the film deposition chamber without complicating mechanisms and steps for setting the base material holder in the film deposition chamber. SOLUTION: A base material holder carrying mechanism to automatically carry a base material holder 60 between the inside and the outside of a vacuum film deposition apparatus 20 is provided inside and outside the vacuum film deposition apparatus 20. The base material holder carrying mechanism has a carrying roller CR to carry the base material holder 60 while supporting it in contact with a lower side thereof. Further a base material holder driving mechanism 30 is provided to drive a rotary shaft of the base material holder 60. An air cylinder is provided, which couples a driving shaft at the tip of the base material holder driving mechanism 30 with a mechanism on the base material holder side by advancing the base material holder driving mechanism 30 when the base material holder 60 is set at the position in the vacuum film deposition apparatus 1 located during the film deposition. COPYRIGHT: (C)2005,JPO&NCIPI