| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate treatment device which has a good responsibility and can stably apply a coating solution to an area to be coated of a substrate; and a substrate treatment method using the device. SOLUTION: An organic EL material (a coating solution) is delivered continuously from a nozzle 4 while the nozzle 4 is being moved relatively to a substrate 1; thus the organic EL material is applied to the substrate 1 in the so-called picture drawing way with a single stroke of a brush. When the nozzle 4 is moved above an area not to be coated, the locus of the organic EL material delivered from the nozzle 4 is changed into a withdrawing locus PA, Pb by using Coanda effects, thereby stopping the supply of the organic EL material to the area not to be coated. The utilization of Coanda effects enables the reception side of the organic EL material to be rapidly and accurately switched. The organic EL material not supplied to the substrate 1 is sucked and withdrawn with suction pipes 51A, 51B to prevent the substrate 1 or each part of the device from being stained by the excess organic EL material. COPYRIGHT: (C)2005,JPO&NCIPI
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