METHOD OF PROCESSING INNER SURFACE OF HOLLOW WORK

摘要

PROBLEM TO BE SOLVED: To provide a method of processing uniformly the inner surface of a hollow work W.

SOLUTION: A work W is held in a vacuum chamber 11, a source gas introduced intermittently to the vacuum chamber 11 is ionized to generate plasma, and a bias voltage V is applied between an electrode 14 inside the work W and the work W, while causing the plasma to exist in the work W. The bias voltage V accelerates ions in the plasma toward the inner surface of the work W.

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