| 摘要 |
PROBLEM TO BE SOLVED: To improve the stability of quality by solving the problem of cross-sectional distortion of a core, relating to an optical waveguide which is made of a polymer resin material and manufactured by using the techniques of stacking, photo-lithography, and reactive ion etching. SOLUTION: A Y-branching optical waveguide device 41 is constituted by forming a Y-branching optical waveguide 42 of a polymer resin material on the top face of a silicon substrate 43. A core 44 constituting the Y-branching optical waveguide 42 has a gradually widening side face 50. The core 44 is formed by performing reactive ion etching to a core layer 10 with oxygen pressure set to a considerably higher pressure 5Pa than usual. COPYRIGHT: (C)2005,JPO&NCIPI |
