发明名称 PRODUCTION APPARATUS FOR GRANULAR CRYSTAL
摘要 <p><P>PROBLEM TO BE SOLVED: To reduce the production cost by producing granular silicon having a uniform grain diameter when the granular silicon or the like is produced. <P>SOLUTION: In a production apparatus for producing granular crystal by discharging/falling down a melt 4 of a crystal material in a granulated state from the bottom of a crucible 1, and at the same time, cooling/solidifying the granulated melt during falling, the crucible 1 is constituted of a cylindrical main body member 2 and a disk-like nozzle member 3 attached to the bottom part of the main body member 2. In the nozzle member 3, a nozzle hole 3a for discharging the melt 4 in a granulated state is perforated from a vertical direction at a certain angle. Further, the nozzle 3 is made rotatable. In this apparatus, it is possible to allow falling droplets to take respective tracks so that they do not come into contact with each other. Thereby, the granulated crystal having a uniform shape and a uniform diameter can be produced stably and efficiently, and the production cost can be reduced by omitting a classification process. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP2005154249(A) 申请公布日期 2005.06.16
申请号 JP20040128407 申请日期 2004.04.23
申请人 KYOCERA CORP 发明人 ONO TOMOYUKI
分类号 B01J2/02;C01B33/021;C30B29/06;C30B30/08;H01L31/04;(IPC1-7):C30B30/08 主分类号 B01J2/02
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