| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a load locking technique capable of suppressing contamination in a body and a temperature drop and achieving high-speed evacuation. <P>SOLUTION: There are provided a load locking chamber 16 used when a substrate 10 is carried into an environment that is in a vacuum or in a specific atmosphere and separated from fresh air from the atmosphere as a body to be treated, a heater 15 that is a means for heating air in the atmosphere, a fan 14 that is a blast means for sending air heated by the heater to a load lock chamber 16, an opening for passing the heated air, and a hot air intake valve 12 for allowing the opening to be reversibly subjected to vacuum sealing. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
