| 摘要 |
PROBLEM TO BE SOLVED: To provide the manufacturing method of an optical element which can manufacture the optical element whose accuracy in shape is higher as compared with that of the conventional product. SOLUTION: In a cylindrical lens array to be manufactured, cylindrical lenses are arranged in line in a direction of normal with lens pitches of (p). Then, an area which can be exposed in one time is an area 1 enclosed with a thick solid line in the figure and it is a rectangular area which has a side of the length of 3p in the direction of normal and a side of the length of (q) in generatrix. In this embodiment, exposure is repeatedly performed with pitches of (p) in the direction of normal and with pitches of (r)(r<q) in the direction of generatrix. Generally, (r) is selected so that (q) becomes an integral multiple of (r). That is, exposure is performed from an end to an end while shifting an exposure position by every (p) in the direction of normal and when exposure reaches the end, exposure is performed by shifting the exposure position by (r) to the direction of generatrix and continuously, exposure is performed to a direction opposite to that of the previous exposure from the end to the end while shifting the exposure position by every 3p in the direction of normal. The whole exposure is completed by repeating this. COPYRIGHT: (C)2005,JPO&NCIPI
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