发明名称 |
SUPER HARD MATERIAL HAVING METAL OXYCARBIDE SINGLE CRYSTAL COATING AND ITS PRODUCING METHOD |
摘要 |
PROBLEM TO BE SOLVED: To form a single crystal of a metal oxycarbide and to provide a super hard material coated with the single crystal of the metal oxycarbide. SOLUTION: The super hard material consists of: a magnesium oxide single crystal or a silicon single crystal; and a single crystal coating of an oxycarbide of a metal selected from molybdenum, chromium and tungsten which is formed on the single crystal. The super hard material is produced by subjecting a metal selected from molybdenum, chromium and tungsten and a carbon oxide or a carbon oxide and a hydrocarbon to a plasma reaction in the presence of the magnesium oxide single crystal substrate or the silicon single crystal substrate kept at 350 to 450°C so as to epitaxially grow the metal oxycarbide single crystal on the surface of the substrate. COPYRIGHT: (C)2005,JPO&NCIPI
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申请公布号 |
JP2005154224(A) |
申请公布日期 |
2005.06.16 |
申请号 |
JP20030398047 |
申请日期 |
2003.11.27 |
申请人 |
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL & TECHNOLOGY |
发明人 |
KADO TETSUO |
分类号 |
B23C5/16;B23P15/28;C23C14/06;C30B29/10;(IPC1-7):C30B29/10 |
主分类号 |
B23C5/16 |
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