| 摘要 |
It is an object of the invention to provide a particulate determination method for determining, by onetime scanning, a particulate of a target size from plural particulates of various sizes which are arranged on a disc, and avoiding false recognition of the number of particulates even when plural particulates adjoin to each other. A PD detection signal is judged using plural threshold values according to the sizes of particulates to be detected, and results of determinations corresponding to the respective threshold values are stored on mutually independent memory maps. When counting particulates, a particulate size and a particulate count value are determined from a combination of stored data in a scanning window at the same position on the respective memory maps.
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