| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a carrier for a grinding process capable of preventing variations in the workpiece thickness after grinding without an uneven distribution of abrasive grains and grinding scraps or the like in a field emission display. <P>SOLUTION: The carrier 8, in which a groove (a spiral groove) 9 along a curved line spirally extended from the central part of a circle in a carrier plane shape to the external peripheral edge is provided to the surface plate-opposing face side in a conventional carrier, is provided. Further, a center circular hole 10 is provided. Consequently, the variations in the workpiece thickness after grinding as the problem can be significantly improved by improving the distribution of the abrasive grains. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
