发明名称 |
METHOD FOR FORMING POROUS MATERIAL AND POROUS MATERIAL FORMED BY THE METHOD |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for forming a porous material by which the stability of the porous material with time is improved and to provide the porous material excellent in stability with time. <P>SOLUTION: The method for forming the porous material has a primary film-forming step to form a primary film involving a skeleton material to form the skeleton of the porous material and a vacancy raw material to be the base of the vacancy of the porous material, a removing step to remove the vacancy raw material from the primary film and a deactivating step to deactivate a reaction-activated surface by reacting the reaction-activated surface at the skeleton exposed by removing the vacancy raw material at the removing step with a deactivation accelerating component. The removing step may be simultaneously performed in parallel with the deactivating step. The removing step and the deactivating step are preferably performed by using a supercritical fluid. A deactivation treatment may be performed by using the deactivation accelerating component supplied in the supercritical fluid at the deactivating step. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
申请公布号 |
JP2005154230(A) |
申请公布日期 |
2005.06.16 |
申请号 |
JP20030398356 |
申请日期 |
2003.11.28 |
申请人 |
KOBE STEEL LTD |
发明人 |
KAWAKAMI NOBUYUKI;HIRANO TAKAYUKI;FUKUMOTO YOSHITO |
分类号 |
C01B33/12;H01L21/316;(IPC1-7):C01B33/12 |
主分类号 |
C01B33/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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