| 摘要 |
PROBLEM TO BE SOLVED: To surely hold a computer-generated hologram and a plane to be inspected at ideal design positions and subject the surface shape of the inspected plane to proper interference measurement, by bringing a holding member to hold the computer-generated hologram in a prescribed attitude, and by placing a spacer between the hold member and an object to be inspected in order to carry out the relative positioning of both the computer-generated hologram and the inspected plane. SOLUTION: An interferometric apparatus is equipped with a light source for alignment 41, a collimator 42, a half mirror 47 and a pinhole plate 48, and is made capable of checking as to whether the computer generated hologram (CGH) 17 is normally opposite to a light beam for alignment. Furthermore, light transmissive targets for alignment are disposed at four corners of the frame of the CGH 17 and at four corners of a mirror to be inspected 18, respectively. Their images are acquired by an imaging lens 43 and a CCD camera 44, and checking can be carried out as to whether the alignment adjustment between the computer generated hologram 17 and the inspected plane 18a is proper. COPYRIGHT: (C)2005,JPO&NCIPI
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