| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe microscope which has realized a needle tip state of monitoring at the of retraction of a probe, in a step-in type scanning probe microscope. SOLUTION: This scanning probe microscope is constituted so that a cantilever 21, having the probe 20 provided to the leading end thereof is provided and the probe 20, is allowed to approach or to retreat with respect to a specimen 12, by moving the cantilever 21 to obtain the surface data of the specimen 12 and equipped with a probe retreat state confirming means 60 for confirming whether the retreating operation of the probe 20 is normal or abnormal. A displacement detector, for detecting the displacement quantity of the cantilever 21, is provided, and the probe retreat state confirming means 60 is composed of a monitor means 49 for monitoring the detection signal outputted from the displacement detector, after the retreat operation of the probe 20 has been completed and a decision means 61 for deciding whether the retreat operation of the probe 20 is normal or abnormal, on the basis of the detection signal monitored by the monitor means 49. COPYRIGHT: (C)2005,JPO&NCIPI
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