| 摘要 |
PROBLEM TO BE SOLVED: To provide a coater capable of performing a uniform high-precision thin-film coating and also corresponding to various coating liquids, and its coating method. SOLUTION: In the coater having an extrusion type die head 1 in which the coating liquid 4 is discharged from a die slit 1 provided with lip parts 7a and 7b at both sides to a traveling direction P on a coating subject 2, and a bead 40 is formed between the coating subject 2 and the lip parts 7a and 7b to make a coating film, the coater is provided with a sensor 8 for detecting a contact position 9 of the lip part and bead at the tip end of the lip part 7a of the traveling direction P side. A plurality of sensors 8 are continuously placed in the traveling direction P of the die head and /or in a direction orthogonal to the traveling direction. COPYRIGHT: (C)2005,JPO&NCIPI
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