发明名称 HOLDING DEVICE FOR AN OPTICAL ELEMENT IN AN OBJECTIVE
摘要 <p>A holding device (6) for an optical element (5) in an objective (1) has a mount (4) that is connected to the objective (1) , on the one hand, and at least indirectly to the optical element (5), on the other hand. Arranged between the mount (4) and the optical element (5) is a reinforcing element (8) whose coefficient of thermal expansion corresponds substantially to the coefficient of thermal expansion of the optical element (5).</p>
申请公布号 WO2005054953(A2) 申请公布日期 2005.06.16
申请号 WO2004EP13228 申请日期 2004.11.22
申请人 CARL-ZEISS SMT AG;ASML NETHERLANDS B.V.;GELLRICH, BERNHARD;WURMBRAND, ANDREAS;KUGLER, JENS;SCHOEPPACH, ARMIN;ZENGERLING, CHRISTIAN;BRUYNOOGHE, STEPHANE 发明人 GELLRICH, BERNHARD;WURMBRAND, ANDREAS;KUGLER, JENS;SCHOEPPACH, ARMIN;ZENGERLING, CHRISTIAN;BRUYNOOGHE, STEPHANE
分类号 G03F7/20;(IPC1-7):G03F7/20 主分类号 G03F7/20
代理机构 代理人
主权项
地址