| 摘要 |
PROBLEM TO BE SOLVED: To provide a wavelength dispersion type X-ray fluorescence analyzer capable of analyzing sufficiently accurately a micro measuring portion having 0.5mm or more to 4mm or less of diameter. SOLUTION: In this X-ray fluorescence analyzer provided with an X-ray source 1 for emitting a beam-like primary X-ray 4 having 0.5 mm or more to 4 mm or less of diameter toward a sample 5 mounted on a sample block 6, a spectroscopic element 8A for dispersing spectrally a secondary X-ray 7 generated from the measuring portion 5a irradiated with the primary X-ray 4 in the sample 5, and a detector 10 for detecting a secondary X-ray 9 spectrally dispersed by the spectroscopic element 8A, the spectroscopic element 8A is a log spiral type spectroscopic element, one focal point F1 having an aberration is positioned in the measuring portion 5a, and the other focal point F2 having no aberration is positioned in a photoreception part of the detector 10. COPYRIGHT: (C)2005,JPO&NCIPI
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