POWDER SUPPLY METHOD, POWDER SUPPLY DEVICE, POLISHING METHOD AND DEVICE BY SUPPLY OF POWDER

摘要

PROBLEM TO BE SOLVED: To provide a method capable of supplying the fixed volume of powder, and a polishing method for providing a smooth surface by using this method. SOLUTION: The powder around a supply side opening end part, is overflowed from the opening end part, and is supplied in a powder carrying pipe, by adding vibration to the powder 14 around the supply side opening end part of the powder carrying pipe 15 turning in the unhorizontal direction. COPYRIGHT: (C)2005,JPO&NCIPI