| 摘要 |
PROBLEM TO BE SOLVED: To enable conveyance of a substrate without deformation and to reduce the conveying time. SOLUTION: In this substrate conveying apparatus, a plurality of pairs of conveying rollers 13 are arranged with an interval in the direction crossing the conveying direction so that both side edges of the lower surface of a glass substrate 3 can be supported, respectively, an air floating unit 2 for supporting the center section of the lower surface of the glass substrate 3 in non-contact is formed between the conveying rollers 13, and the glass substrate 3 is conveyed by rotating the conveying rollers 13. The substrate conveying apparatus has an energizing means for energizing the glass substrate 3 to the conveying roller 13 side. In the energizing means, a suction hole 24 is formed in the air floating unit 2, and an intake air blower is connected to the suction hole 24 via a duct. COPYRIGHT: (C)2005,JPO&NCIPI
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