FLOATING CONVEYING SYSTEM, FLOATING CONVEYING HANDLING SYSTEM OF CONVEYED BODY USING FLOATING CONVEYING SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a floating conveying system capable of realizing space saving of an installation space of a conveyed body and securing degree of designing freedom of a conveyance route. SOLUTION: A plate-like conveyed body is stored in every tray having a plurality of stages of a conveyed body supplying cassette 41. A plurality of lower-stage conveying units 43 for floating and conveying the conveyed body in a predetermined direction with pressure gas injected from each tip of the nozzles 22d formed in a plurality of nozzle members are arranged adjacently in the same plane. A plurality of upper-stage conveying units 44 for floating and conveying the conveyed body in the predetermined direction with the pressure gas injected from each tip of the nozzles formed in the plurality of nozzle members 22d are arranged adjacently in the same plane over the lower-stage conveying units. The conveyed body is delivered between the lower-stage conveying units 43 and the upper-stage conveying units 44 by a lift conveying unit 45 for floating and lifting the conveyed body with the pressure gas injected from each tip of the nozzles 22d formed in the plurality of nozzle members, and the conveyed body is handled by a handling unit 42. COPYRIGHT: (C)2005,JPO&NCIPI