End effector used in the manufacture of integrated circuits comprises a gripper bearing rail for attaching to an arm of a pod opener, a pair of gripper arms arranged on opposite ends of the gripper bearing rail

摘要

End effector (40) for attaching to a distal end of an arm housed in a pod opener comprises a gripper bearing rail (52) for attaching to the distal end of the arm of the pod opener, a pair of gripper arms (58a, 58b) arranged on opposite-lying ends of the gripper bearing rail, and a pair of reticle side grippers (66a, 66b). Independent claims are also included for: (1) Pod openers; and (2) Alternative end effector.