| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser diode array capable of enhancing the yield in an LD bar sorting work and capable of enhancing the pumping efficiency of a laser without introducing a large scale system, and to provide a laser oscillator and laser processing apparatus. SOLUTION: A plurality of LD bars 2 are soldered to a plurality of heat sinks 1 provided with a refrigerant channel 1a, respectively, and cooling the LD bars 2 individually. The heat sink 1 is fixed to a manifold 3 provided with supply channels 6a-6f having a different conduction cross-sectional area of refrigerant 13 for respective fixing parts 3a-3f. A heat sink 1 mounting an LD bar 2 having an oscillation wavelength shifted to the short wavelength side is fixed to the fixing part 3f provided with the supply channel 6f having a small conduction cross-sectional area, and a heat sink 1 fixed with an LD bar 2 having an oscillation wavelength shifted to the long wavelength side is fixed to the fixing part 3a provided with the supply channel 6a having a large conduction cross-sectional area. COPYRIGHT: (C)2005,JPO&NCIPI |
