| 摘要 |
PROBLEM TO BE SOLVED: To provide a depositing method forming a film with uniform film thickness, the film formed of the depositing method, an electronic device having the film, and electronic equipment. SOLUTION: The depositing method has a process for forming a mask 6 on a base material 5, a process for supplying a liquid material 7 for forming the film in an opening part 61 of the mask 6, a process for performing first heat treatment on the liquid material 7 and half-solidifying it, a process for removing the mask 6, a process for swelling a half-solidified liquid material 8', and a process for performing second heat treatment on the half-solidified liquid material 8'. Thus, the film 8 whose face on a side opposite to the base material 5 is flattened can be obtained by removing the mask 6 prior to solidification of the liquid material 7. COPYRIGHT: (C)2005,JPO&NCIPI |
