| 摘要 |
PROBLEM TO BE SOLVED: To provide a workpiece pedestal to inhibit generation of ESD and adhesion of dust, by making a contact area small and maintaining a stable support status on the workpiece. SOLUTION: In the case of a flatness test, a central convex part 22 of a flat column-shaped pedestal body 21 is fixed on a hole part Wa of an annular shape workpiece W. Then, on the work-piece pedestal which supports horizontally at the inner circumference of the work-piece W from downward by an annular face 21a which encloses the central convex part 22, the fine projections 24A(64A)(74A) with their edges having the sharp points are allotted and formed to all regions equally at the annular face 21a in the pedestal body 21, the tops 24a(64a)(74a) of the fine projections 24A(64A)(74A) are set as a workpiece support face. COPYRIGHT: (C)2005,JPO&NCIPI
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