| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact package for a pressure-detecting device, which has high sensitivity for detecting external pressures and can accurately detect the external pressures, over a long period of time. SOLUTION: The package for the pressure detecting device comprises an insulating substrate 1, having a mount section 1b in its one main surface, on which a semiconductor element 3 is mounted; wiring conductors 5 which are disposed on and inside the insulating substrate 1 and by which the semiconductor element 3 is electrically connected; an insulating plate 2 which is bonded to the insulating substrate 1 flexibly so as to form a sealed space between itself and the other main surface of the insulating substrate 1; a first electrode 7, which is attached to the other main surface of the insulating substrate 1 in the sealed space, electrically connected to one of the wiring conductors 5 and used for making up a capacitor; and a second electrode 9 which is attached to the inner main surface of the insulating plate 2 so as to be opposite to the first electrode 7, electrically connected to another wiring conductor 5 and used for making up the capacitor. A recessed section is formed in the main surface of the insulating plate 2 which is on the sealed space side, and a concave curve is formed between the inner wall and the bottom plate section 2b of the recessed section. COPYRIGHT: (C)2005,JPO&NCIPI
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