| 摘要 |
PROBLEM TO BE SOLVED: To suppress oxidation erosion of window foil by exhausting oxidation water generated on the window foil, and to prevent stagnation of oxidation water. SOLUTION: The periphery of the window foil 4 is overlapped on the lower flange 2 of a scanning tube 1 via annular seals 3, and a frame shape pushing plate 5 on the periphery of the window foil 4; the pushing plate 5 is stopped with screws to the flange 2; and in the inside position of seals 3 of both ends of pushing plate 5, discharge outlet 14 opening in the window foil 4 are formed and dry gas is supplied to the discharge outlet 14 through a supply path from the periphery of the pushing plate 5. COPYRIGHT: (C)2005,JPO&NCIPI
|
