| 摘要 |
PURPOSE: A positive electrode thin film for an all solid lithium thin film battery, its preparation method and an all solid lithium thin film battery containing the positive electrode thin film are provided, to improve electrochemical properties without heating process. CONSTITUTION: The positive electrode thin film is prepared by vapor depositing a positive electrode active material at a room temperature with impressing a negative bias voltage of 0 V to -70 V (except 0 V) by using a radio-frequency power supply device to a substrate, to form a crystallized positive electrode thin film on the substrate. Preferably the substrate is a silicon substrate, glass, a polymer or a metal substrate with a low melting point; and the positive electrode active material is a composite oxide of lithium and a transition metal. Preferably the positive electrode thin film has an initial discharge capacity of 63 μAh/cm2·μ m and a discharge capacity of 30 μAh/cm2·μm at about 65-300 cycle, and has a microcrystalline structure having a thickness of 200-500 nm and a size of 5-30 nm. |
