| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a holder for an inspection apparatus, in which an object for inspection such as a glass substrate, a mask blank and a photomask is mounted, by using a general-purpose handling tool and the object in a mounted state can be inspected for transmitted light up to its peripheral portion. <P>SOLUTION: The holder 100 for an inspection apparatus has a fixing member 40 composed of a support member 21 and a positioning member 31 disposed at a prescribed positions on a planar support base 11. The support base 11 comprises a transparent glass substrate, a plastic plate or the like. The fixing member 40 positions the object of inspection in X and Y directions and holds the object, and the upper face of the positioning member 31 of the fixing member 40 is tapered and is made of a material having high elasticity. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
