| 摘要 |
PROBLEM TO BE SOLVED: To provide an observation method which is effective for obtaining an image having crystallographic information using a scanning transmission electron microscope (STEM), and also to provide an observation apparatus. SOLUTION: In the observation method wherein a sample is irradiated with an electron beam, and electrons scattered from the sample are detected, the detection is performed under the condition that the irradiation angle of the electron beam for irradiating the sample is not less than the collecting angle of the electron beam to be detected. Circular two-dimensional detectors are used for the detection. Signals are detected partially and selectively from the two-dimensional detector. A plurality of two-dimensional detectors are used to detect the signals partially and selectively. The signals obtained by the detection are computed. COPYRIGHT: (C)2005,JPO&NCIPI
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