| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a nozzle plate which improves a stable discharge velocity limit for ink droplets to be discharged from a nozzle hole by defining the shape, on the outlet side of a laser light, of a through hole formed of a plurality of stacked mask openings and thereby, can enhance ink droplet impact precision, and a nozzle plate and an inkjet recording head. SOLUTION: In this method for manufacturing a nozzle plate, a plurality of masks 8 with an opening are arranged to stack on a nozzle plate material 10 and the through hole which becomes the nozzle hole and a tapered part connected with the former are formed by irradiating the nozzle plate material 10 with the laser light L transmitted through a transmission part while changing the area of the transmission part formed of mutually stacked openings of the masks 8. The shape, on the outlet side of the laser light L, of the through hole is circular and the short diameter/long diameter of the circle are 0.8 to 1.0. COPYRIGHT: (C)2005,JPO&NCIPI
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