| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for casting silicon in which, when a polycrystalline silicon ingot is cast, the release of heat from the side face of a mold caused by the release of heat with a cooling means is prevented, thus the cracks of the silicon ingot are prevented. SOLUTION: The apparatus for casting silicon is equipped with: a mold 1 provided with an opening part at the upper part and having a bottom part and side parts, and in which a silicon melt 4 is held/solidified at the inside; a mold heat insulating material 3 surrounding the outer circumferences of the side parts in the mold 1; a mold heating means 6 arranged above the mold 1; and a cooling means 7 arranged below the mold 1. A mold holder 5 is interposed between the mold 1 and the cooling means 7, and is arranged so as to abut against each of them. Further, when the silicon melt 4 is held inside the mold 1, the ratio between a heat flux A going from about the central part of the bottom part in the mold 1 to the cooling means 7 through the mold holder 5 and a heat flux B going from the part directly below the side part in the mold 1 to the cooling means 7 through the mold holder 5, i.e., the heat flux ratio A/B is controlled to >1. COPYRIGHT: (C)2005,JPO&NCIPI
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