| 摘要 |
PROBLEM TO BE SOLVED: To accurately measure the amount of pollutants deposited in a treatment chamber by energy beam irradiation. SOLUTION: The treatment chamber is filled with atmosphere, containing a predetermined substance and a quartz vibrator, is irradiated with the energy beam in this atmosphere containing the predetermined substance to bond the pollutant to the quartz vibrator. The resonance frequency of the quartz vibrator is measured, in parallel with the irradiation with the energy beam. By using the phenomenon that the resonance frequency of the quartz vibrator lowers with the increase in weight, a chanze in the weight of the quartz vibrator is calculated from the change in the resonance frequency of the quartz vibrator, to measure the amount of the pollutant bonded on the quartz vibrator. COPYRIGHT: (C)2005,JPO&NCIPI
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