发明名称 |
Hintergrundbeleuchtetes Photodioden-Array und Verfahren zum Herstellen desselben |
摘要 |
Both electrodes of the anode and cathode of a photodiode in a semiconductor substrate (1) are collected at one side thereof. This is achieved by leading one electrode electrically to the other side through a hole H penetrating the semiconductor substrate (1) and the time required for boring the hole H is shortened because the semiconductor substrate (1) has been made thin by polishing. Since a supporting substrate (3) is attached to the semiconductor substrate (1) in order to reinforce the thinned substrate during production process, handling of the wafer is facilitated during process resulting in a photodiode suitable for mass production. |
申请公布号 |
DE10392637(T5) |
申请公布日期 |
2005.06.16 |
申请号 |
DE2003192637T |
申请日期 |
2003.05.09 |
申请人 |
HAMAMATSU PHOTONICS K.K., HAMAMATSU |
发明人 |
FUJII, YOSHIMARO;OKAMOTO, KOUJI;SAKAMOTO, AKIRA |
分类号 |
H01L27/146;H01L31/0224;(IPC1-7):H01L27/146 |
主分类号 |
H01L27/146 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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