| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a thin film formation method capable of stably forming a soil-resistant film having high uniformity, excellent water repellency, oil repellency, sebum and ink wiping properties and repetitive durability thereof even if long-term thin film formation is performed continuously. <P>SOLUTION: The thin film formation method forms a thin film on a base material by introducing thin film forming gas into a discharge space consisting of a first electrode and second electrode facing each other under the atmospheric pressure or a pressure near the atmospheric pressure, applying an electric field to the thin film forming gas to excite the gas, and exposing the base material to the excited thin film forming gas. The thin film forming gas contains an organometallic compound having an organic group including a fluorine atom. The second electrode has a cleaning film for preventing the electrode from being directly exposed to the excited thin film forming gas. The cleaning film is transported while being held in tight contact with the discharge surface of the second electrode. The base material is transported while being held in tight contact with the discharge surface of the first electrode when exposed to the excited thin film forming gas. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
